Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review

Fu, Yong Qing, Luo, Jikui, Du, X., Flewitt, Andrew, Li, Yifan, Markx, G., Walton, Anthony and Milne, William (2010) Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review. Sensors and Actuators B: Chemical, 143 (2). pp. 606-619. ISSN 0925-4005

Full text not available from this repository. (Request a copy)
Official URL: http://dx.doi.org/10.1016/j.snb.2009.10.010

Abstract

Recent developments on the preparation and application of ZnO films for acoustic wave-based microfluidics and biosensors are reviewed in this paper. High quality and strongly textured ZnO thin films can be prepared using many technologies, among which RF magnetron sputtering is most commonly used. This paper reviews the deposition of ZnO film and summarizes the factors influencing the microstructure, texture and piezoelectric properties of deposited ZnO films. ZnO acoustic wave devices can be successfully used as biosensors, based on the biomolecule recognition using highly sensitive shear horizontal and Love-wave surface acoustic waves, as well as film bulk acoustic resonator devices. The acoustic wave generated on the ZnO acoustic devices can induce significant acoustic streaming, small scale fluid mixing, pumping, ejection and atomization, depending on the wave mode, amplitude and surface condition. The potential to fabricate an integrated lab-on-a-chip diagnostic system based on these ZnO acoustic wave technologies is also discussed.

Item Type: Article
Subjects: F100 Chemistry
F200 Materials Science
F300 Physics
H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Mechanical and Construction Engineering
Depositing User: Yifan Li
Date Deposited: 26 Feb 2015 13:08
Last Modified: 26 Oct 2015 16:08
URI: http://nrl.northumbria.ac.uk/id/eprint/21243

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year

View more statistics


Policies: NRL Policies | NRL University Deposit Policy | NRL Deposit Licence