ZnO based SAW and FBAR devices for bio-sensing applications

Flewitt, Andrew, Luo, Jikui, Fu, Yong Qing, Garcia-Gancedo, Luis, Du, X.Y., Lu, J. R., Zhao, X. B., Iborra, Enrique, Ramos, M. and Milne, William (2015) ZnO based SAW and FBAR devices for bio-sensing applications. Journal of Non-Newtonian Fluid Mechanics, 222. pp. 209-216. ISSN 0377 0257

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Abstract

ZnO thin film based surface and bulk acoustic wave devices are reviewed in this paper. The films were initially produced using a standard RF sputtering technique. However in order to produce lower stress, smoother films at low temperatures, a novel High Target Utilisation Sputtering (HiTUS) system has also been utilised. The ZnO acoustic devices have been used to move, mix, pump, eject and atomise liquids depending upon the amplitude of the signal and the condition of the surface. Such Surface Acoustic Wave (SAW) devices have also been shown to act as bio sensors but more sensitive detection is obtainable by the use of Film Bulk Acoustic Resonators (FBARs), the design and operation of which are described at the end of this review. Whilst the interaction of the acoustic wave with a fluid on its surface allows its rheological properties to be measured, such as viscosity, it is speculated that the combination of SAW and FBAR technologies may also provide new opportunities for rheometry on the microscale where fluids generally follow a non-Newtonian behaviour.

Item Type:	Article
Uncontrolled Keywords:	surface acoustic waves, FBARs, Bio sensors
Subjects:	F200 Materials Science F300 Physics
Department:	Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User:	Becky Skoyles
Date Deposited:	23 Mar 2015 09:24
Last Modified:	12 Oct 2019 19:20
URI:	http://nrl.northumbria.ac.uk/id/eprint/21653

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