Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers

Zhou, X. S., Zhao, Chao, Hou, Ruozhou, Zhang, Jia, Kirk, Katherine, Hutson, David, Guo, Yuanjun, Hu, Ping An, Peng, Shuming, Zu, Xiao-Tao and Fu, Yong Qing (2014) Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers. Ultrasonics, 54 (7). pp. 1991-1998. ISSN 0041-624X

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Official URL: http://dx.doi.org/10.1016/j.ultras.2014.05.006

Abstract

Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50 μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600 °C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded onto steel plates, and the pulse-echo tests verified a good performance (with dominant longitudinal waves) of the ultrasonic transducers made from both as-deposited and post-annealed films. Inclined angled ZnO films on the Al foil glued onto steel plates generated mixed shear and longitudinal waves in the pulse-echo test.

Item Type: Article
Uncontrolled Keywords: ZnO film, annealing, flexible ultrasonic transducer, pulse-echo, ultrasonic wave
Subjects: F200 Materials Science
Department: Faculties > Engineering and Environment > Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 23 Mar 2015 15:34
Last Modified: 11 Jan 2017 11:32
URI: http://nrl.northumbria.ac.uk/id/eprint/21747

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