Microfabrication of microlens array by focused ion beam technology

Fu, Yong Qing, Kok, Ngoi and Bryan, Ann (2000) Microfabrication of microlens array by focused ion beam technology. Microelectronic Engineering, 54 (3-4). pp. 211-221. ISSN 0167 9317

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Official URL: http://dx.doi.org/10.1016/S0167-9317(00)00416-0

Abstract

Microfabrication process of plano-convex microlens arrays with continuous relief for refractive and diffractive usage by focused ion beam (FIB) technology is introduced in detail in this paper. Two functions of FIB – milling and deposition of SiO2 are used for the fabrication. A 9×9 micro-diffractive optical elements (DOEs) array with singlet f-number of 2 and NA value of 0.25, and a 9×9 refractive microlens array with singlet diameter of 60 μm, NA value of 0.1, and f-number of 5 are designed and fabricated by the milling method. In addition, the other method of FIB induced SiO2 deposition for microlens is introduced. The lens profile and focusing characteristics are measured by WYKO NT2000 interferometer and BeamScope-5 PTM beam scanner respectively. Focused spot size is about 6.7 μm (at site of 50%) and 5.1 μm (at site of 1/e2: 13.5%) for diffractive lens and refractive lens array respectively. The RMS thickness error within a diameter of 27 μm DOEs and 60 μm of refractive lens (by the way of milling) is 11 nm, and 15 nm respectively. Wave aberration for both of them are 1.7 wave and 1.5 wave respectively.

Item Type: Article
Uncontrolled Keywords: Microlens array, microfabrication, focussed ion beam
Subjects: F200 Materials Science
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 24 Mar 2015 15:34
Last Modified: 24 Oct 2017 08:55
URI: http://nrl.northumbria.ac.uk/id/eprint/21763

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