Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure

Luo, Jikui, Huang, R., He, Johnny, Fu, Yong Qing, Flewitt, Andrew, Spearing, S. M., Fleck, Norman and Milne, William (2006) Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure. Sensors and Actuators A: Physical, 132 (1). pp. 346-353. ISSN 0924 4247

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Official URL: http://dx.doi.org/10.1016/j.sna.2006.03.004

Abstract

Multi-finger microcages with metal/diamond like carbon (DLC) bilayer and polymer/metal/DLC trilayer structures were analyzed, simulated and fabricated. Modelling by finite element analysis showed that a soft polymer can be used together with DLC to form a normally closed microcage which can be opened by 90° angle at a temperature of ∼400 K, which is much lower than that of a metal/DLC bilayer structure previously demonstrated. The opening temperature for a microcage is independent of the finger dimensions, but is simply determined by the thermal expansion coefficient difference of two materials used. Microcages with SU8/DLC bilayer and SU8/Al/DLC trilayer structures have been fabricated and fully closed microcages with diameters of ∼40 μm have been obtained. Initial electrical tests have showed these devices open by more than 90° at a temperature lower than 150 °C, roughly in agreement with the theoretical analysis.

Item Type: Article
Uncontrolled Keywords: Microcage; Microgripper; Thermal actuator; DLC; Trilayer; Bilayer
Subjects: F200 Materials Science
Department: Faculties > Engineering and Environment > Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 27 Mar 2015 09:45
Last Modified: 03 Mar 2016 11:00
URI: http://nrl.northumbria.ac.uk/id/eprint/21875

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