Microactuators of free-standing TiNiCu films

Fu, Yong Qing, Luo, J. K., Flewitt, Andrew, Ong, Soon-Eng, Zhang, Sam, Du, Hejun and Milne, William (2007) Microactuators of free-standing TiNiCu films. Smart Materials and Structures, 16 (6). pp. 2651-2657. ISSN 0964-1726

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Official URL: http://dx.doi.org/10.1088/0964-1726/16/6/070

Abstract

Ti50Ni47Cu3 films were prepared using magnetron sputtering deposition, and their martensitic transformation and mechanical properties were characterized. Free-standing TiNiCu films showed an intrinsic two-way shape memory effect which is attributed to a composition gradient through the film thickness. Different types of TiNiCu microactuators, including microtweezers and microcages, have been successfully fabricated which employ this two-way shape memory effect for operation. Upon heating/cooling, the microtweezers showed both horizontal and vertical displacement due to combined shape memory and thermal effects. The microcage actuators could be opened/closed through substrate heating with a maximum temperature of 90 °C, or by electrical heating with a power less than 5 mW and a maximum frequency of 100–300 Hz. Issues related to the fabrication and applications, such as stability and beam bending after release, have been addressed.

Item Type: Article
Subjects: F200 Materials Science
Department: Faculties > Engineering and Environment > Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 27 Mar 2015 10:18
Last Modified: 09 Mar 2016 15:11
URI: http://nrl.northumbria.ac.uk/id/eprint/21881

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