Improving the deposition rate of multicomponent coating by controlling substrate table rotation in a magnetron sputtering process

Haider, Julfikar and Hashmi, Mohammed (2010) Improving the deposition rate of multicomponent coating by controlling substrate table rotation in a magnetron sputtering process. Advanced Materials Research, 83-86. pp. 977-984. ISSN 1022-6680

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Official URL: http://dx.doi.org/10.4028/www.scientific.net/AMR.8...

Abstract

Physical Vapour Deposition (PVD) technology, particularly magnetron sputtering process, enjoys the competitive advantages of depositing different new generation coatings (e.g., multicomponent, multilayer, graded, composite etc.) on three-dimensional objects (substrate) with excellent mechanical and tribological properties. In an industrial-scale sputtering chamber with a limited number of active magnetron sources (target) on the chamber wall, the density of coating species from different sources would not be uniform everywhere around the chamber. As a result, at a constant speed of rotating substrate table in a single revolution, the instantaneous deposition rate will be highest in front of the active targets and lowest when the substrate moves away from the active targets. In this work, a method of controlling the rotational speed (i.e., slower speed in front of active targets and faster speed in front of inactive targets in a revolution) of a substrate table installed in a magnetron sputtering chamber has been developed in order to improve the deposition rate of a multicomponent TiN+MoSx coating. The mechanical and tribological properties of TiN+MoSx coating have also been characterised to assess the beneficial effects of adding solid lubricant (MoS2) in hard TiN coating.

Item Type: Article
Uncontrolled Keywords: deposition rate, magnetron sputtering, substrate rotation
Subjects: H700 Production and Manufacturing Engineering
Department: Faculties > Engineering and Environment > Physics and Electrical Engineering
Depositing User: EPrints Services
Date Deposited: 30 Oct 2009 12:56
Last Modified: 02 Mar 2016 15:18
URI: http://nrl.northumbria.ac.uk/id/eprint/255

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