Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

Fu, Yong Qing, Luo, Jack, Nguyen, Nam-Trung, Walton, Anthony, Flewitt, Andrew, Zu, Xiao-Tao, Li, Yifan, McHale, Glen, Matthews, Allan, Iborra, Enrique, Du, Hejun and Milne, William (2017) Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications. Progress in Materials Science, 89. pp. 31-91. ISSN 0079-6425

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Official URL: http://doi.org/10.1016/j.pmatsci.2017.04.006

Abstract

Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acoustic wave sensing/microfluidic devices have been fabricated by depositing these piezoelectric films onto a number of substrates such as silicon, ceramics, diamond, quartz, glass, and more recently also polymer, metallic foils and bendable glass/silicon for making flexible devices. Such thin film acoustic wave devices have great potential for implementing integrated, disposable, or bendable/flexible lab-on-a-chip devices into various sensing and actuating applications. This paper discusses the recent development in engineering high performance piezoelectric thin films, and highlights the critical issues such as film deposition, MEMS processing techniques, control of deposition/processing parameters, film texture, doping, dispersion effects, film stress, multilayer design, electrode materials/designs and substrate selections. Finally, advances in using thin film devices for lab-on-chip applications are summarised and future development trends are identified.

Item Type: Article
Uncontrolled Keywords: Piezoelectric, thin film, acoustic wave; biosensor; microfluidics; acoustofluidics; lab-on-chip; ZnO; AlN
Subjects: H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Physics and Electrical Engineering
Depositing User: Paul Burns
Date Deposited: 15 Mar 2017 17:11
Last Modified: 17 Aug 2017 00:24
URI: http://nrl.northumbria.ac.uk/id/eprint/30111

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