A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout

Bilgin, Habib, Zahertar, Shahrzad, Sadeghzadeh, Seyedehayda, Yalcinkaya, Arda and Torun, Hamdi (2016) A MEMS-based terahertz detector with metamaterial-based absorber and optical interferometric readout. Sensors and Actuators A: Physical, 244. pp. 292-298. ISSN 0924-4247

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Official URL: https://doi.org/10.1016/j.sna.2016.04.021

Abstract

A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 0.5–2 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a detectivity (D*) of 2 × 109 cm Hz−1/2/W and a refresh rate of 20 Hz.

Item Type: Article
Uncontrolled Keywords: MEMS, Terahertz technology, Metamaterials, Microfabrication, Optical readout
Subjects: H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 08 Jan 2018 15:05
Last Modified: 08 Jan 2018 15:05
URI: http://nrl.northumbria.ac.uk/id/eprint/33038

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