A 35-μm Pitch IR Thermo-Mechanical MEMS Sensor With AC-Coupled Optical Readout

Adiyan, Ulas, Civitci, Fehmi, Ferhanoglu, Onur, Torun, Hamdi and Urey, Hakan (2015) A 35-μm Pitch IR Thermo-Mechanical MEMS Sensor With AC-Coupled Optical Readout. IEEE Journal of Selected Topics in Quantum Electronics, 21 (4). pp. 87-92. ISSN 1077-260X

Full text not available from this repository.
Official URL: https://doi.org/10.1109/JSTQE.2014.2384503
Item Type: Article
Subjects: H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Ellen Cole
Date Deposited: 20 Feb 2018 16:00
Last Modified: 20 Feb 2018 16:00
URI: http://nrl.northumbria.ac.uk/id/eprint/33445

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