Fabrication of micron scale metallic structures on photo paper substrates by low temperature photolithography for device applications

Cooke, Michael and Wood, David (2015) Fabrication of micron scale metallic structures on photo paper substrates by low temperature photolithography for device applications. Journal of Micromechanics and Microengineering, 25 (11). p. 115017. ISSN 0960-1317

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Official URL: https://doi.org/10.1088/0960-1317/25/11/115017

Abstract

Using commercial standard paper as a substrate has a significant cost reduction implication over other more expensive substrate materials by approximately a factor of 100 (Shenton et al 2015 EMRS Spring Meeting; Zheng et al 2013 Nat. Sci. Rep. 3 1786). Discussed here is a novel process which allows photolithography and etching of simple metal films deposited on paper substrates, but requires no additional facilities to achieve it. This allows a significant reduction in feature size down to the micron scale over devices made using more conventional printing solutions which are of the order of tens of microns. The technique has great potential for making cheap disposable devices with additional functionality, which could include flexibility and foldability, simple disposability, porosity and low weight requirements. The potential for commercial applications and scale up is also discussed.

Item Type: Article
Uncontrolled Keywords: paper, flexible, photolithography, microelectronics
Subjects: F200 Materials Science
Department: Faculties > Engineering and Environment > Geography and Environmental Sciences
Depositing User: Becky Skoyles
Date Deposited: 28 Mar 2018 12:22
Last Modified: 28 Mar 2018 12:51
URI: http://nrl.northumbria.ac.uk/id/eprint/33877

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