Raman and finite-element analysis of a mechanically strained silicon microstructure

Bowden, Michael, Gardiner, Derek, Wood, David, Burdess, James, Harris, Alun and Hedley, John (2000) Raman and finite-element analysis of a mechanically strained silicon microstructure. Journal of Micromechanics and Microengineering, 11 (1). pp. 7-12. ISSN 0960-1317

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Official URL: https://doi.org/10.1088/0960-1317/11/1/302

Abstract

Raman microspectroscopy has been used to determine the volumetric micro-strain distribution in mechanically stressed silicon microstructures. Data are presented as strain images with a spatial resolution of around 0.8 µm. A useful correlation is demonstrated between finite-element analysis calculations of volumetric strain and Raman shift. The results demonstrate that silicon beam structures incorporating a 90° bend will experience a non-uniform stress distribution along the bend radius for small radii of curvature.

Item Type: Article
Subjects: H900 Others in Engineering
Department: Faculties > Engineering and Environment > Geography and Environmental Sciences
Depositing User: Becky Skoyles
Date Deposited: 28 Mar 2018 14:21
Last Modified: 28 Mar 2018 14:21
URI: http://nrl.northumbria.ac.uk/id/eprint/33880

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