Optimizing MOM diode performance via the oxidation technique

Dodd, Linzi, Wood, David and Gallant, Andrew (2011) Optimizing MOM diode performance via the oxidation technique. In: 2011 IEEE SENSORS Proceedings. IEEE, pp. 176-179. ISBN 978-1-4244-9290-9

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Official URL: https://doi.org/10.1109/ICSENS.2011.6127347

Abstract

This work presents a study of the effect of a simple oxidation technique on the electrical performance of Ti/TiOx/Pt MOM (metal-oxide-metal) diodes. A fabrication process has been designed to produce devices with a high yield. The I-V characteristics show good diode behavior: subsequent mathematical analysis to extract the key parameters of curvature coefficient and resistance at zero bias demonstrate how these numbers depend on the curve fitting method. Nevertheless, diodes with high curvature (typically 5.5 V-1 unbiased, 15 V-1 biased) represent results among the best to date. Complimentary physical information from the structures has been obtained via AFM and RBS analysis.

Item Type: Book Section
Subjects: H900 Others in Engineering
Department: Faculties > Engineering and Environment > Geography and Environmental Sciences
Depositing User: Becky Skoyles
Date Deposited: 17 Apr 2018 09:22
Last Modified: 17 Apr 2018 09:22
URI: http://nrl.northumbria.ac.uk/id/eprint/33999

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