Bistable nonlinear response of MEMS resonators

Ghayesh, Mergen H. and Farokhi, Hamed (2017) Bistable nonlinear response of MEMS resonators. Nonlinear Dynamics, 90 (3). pp. 1627-1645. ISSN 0924-090X

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Official URL: http://dx.doi.org/10.1007/s11071-017-3753-1

Abstract

This study, for the first time, investigates the nonlinear bistable response of electrically actuated initially imperfect viscoelastic microresonators under DC and AC actuations, while including fringing field effects and retaining both longitudinal and transverse motions. The modified version of the couple stress theory, the Kelvin–Voigt material, and the Meijs–Fokkema electrostatic formula are employed in order to develop a multi-physics model of the electrically actuated initially curved microresonator while accounting for the effects of geometrical nonlinearities, damping nonlinearities, fringing field, small size, and residual axial load. The developed continuous multi-physics model is reduced to set of differential equations of ordinary type, which are nonlinearly coupled, employing a weighted residual method and solved numerically making use of a continuation technique. The numerical simulations results are shown via plots of static deflection and natural frequency versus the DC voltage as well as plots of motion amplitude versus the AC frequency.

Item Type: Article
Uncontrolled Keywords: Initially curved microresonator, Fringing field effect, Electrically actuated, Nonlinear damping, Bistability, Modified couple stress theory
Subjects: H300 Mechanical Engineering
H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Mechanical and Construction Engineering
Depositing User: Paul Burns
Date Deposited: 14 Aug 2018 08:50
Last Modified: 14 Aug 2018 08:50
URI: http://nrl.northumbria.ac.uk/id/eprint/35310

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