Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices

Li, W., Guo, Y. J., Tang, Q. B., Zu, X. T., Ma, J. Y., Wang, L., Tao, K., Torun, Hamdi and Fu, Yong Qing (2019) Highly sensitive ultraviolet sensor based on ZnO nanorod film deposited on ST-cut quartz surface acoustic wave devices. Surface and Coatings Technology, 363. pp. 419-425. ISSN 0257-8972

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Abstract

A highly sensitive surface acoustic wave (SAW) ultraviolet (UV) detector operated at room temperature was developed using a sensing layer of zinc oxide (ZnO) nanorods (NRs) grown on ST-cut quartz using a hydrothermal method. Under illumination of the UV light with a wavelength of 365 nm and an intensity of 6 μW cm−2, the resonant frequency of the SAW UV sensor based on ZnO NRs/ZnO nanofilm structure was decreased by ~200 Hz, mainly due to electroacoustic effect. The estimated enhancement in the sensitivity based on the experimental results is ~3.5 folds compared to a device with only a thin nanolayer ZnO film. Meanwhile, density of ZnO NRs over the ZnO seed layer was also investigated and an optimum design was proposed.

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