Laser trimming of CuAlMo thin-film resistors: effect of laser processing parameters

Birkett, Martin and Penlington, Roger (2012) Laser trimming of CuAlMo thin-film resistors: effect of laser processing parameters. Journal of Electronic Materials, 41 (8). pp. 2169-2177. ISSN 0361-5235

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Official URL: http://dx.doi.org/10.1007/s11664-012-2103-9

Abstract

This paper studies the effect of varying laser trimming parameters on the electrical performance of CuAlMo thin film resistors. The films were prepared on Al2O3 substrates by DC magnetron sputtering, before being laser timed to target resistance value. The effect of varying laser power, Q-rate and bite size on the resistor stability and tolerance accuracy were then systematically investigated. By reducing laser power and bite size and balancing this with Q-rate setting, it was possible to achieve resistor tolerance accuracies of <±0.5% with significant improvements in resistor stability.

Item Type: Article
Uncontrolled Keywords: Thin film, resistor, laser trimming, optimization
Subjects: H300 Mechanical Engineering
Department: Faculties > Engineering and Environment > Mechanical and Construction Engineering
Depositing User: Martin Birkett
Date Deposited: 25 Jul 2012 11:37
Last Modified: 10 Aug 2015 11:14
URI: http://nrl.northumbria.ac.uk/id/eprint/8221

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