Rocking disc electro-deposition of copper films on Mo/MoSe2 substrates

Cummings, Charles, Frith, Paul, Zoppi, Guillaume, Forbes, Ian, Rogers, Keith, Lane, David and Marken, Frank (2011) Rocking disc electro-deposition of copper films on Mo/MoSe2 substrates. Thin Solid Films, 519 (21). pp. 7458-7463. ISSN 0040-6090

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Abstract

A novel electro-deposition method based on a rocking disc system with π/3 amplitude and variable frequency is introduced. Uniform copper films were deposited from a 0.1 M CuSO4/3.0 M NaOH/0.2 M sorbitol bath directly onto 12.1 cm2 Mo/MoSe2 substrates with X-ray diffraction showing a thickness variation of ±5% over this area. Investigation of the mass transport conditions suggests (i) uniform diffusion over the sample, (ii) a rate of mass transport proportional to the square root of the rocking rate, and (iii) turbulent conditions, which are able to dislodge gas bubbles during electro-deposition.

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