Deposition of TiN layer on TiNi thin films to improve surface properties

Fu, Yong Qing, Du, Hejun and Zhang, Sam (2003) Deposition of TiN layer on TiNi thin films to improve surface properties. Surface and Coatings Technology, 167 (2-3). pp. 129-136. ISSN 0257 8972

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TiNi based shape memory alloy (SMA) thin films have been widely used in biomedical and microelectromechanical systems. However, there are still some concerns for their wide applications because of their unsatisfactory mechanical and tribological performances, chemical resistance and biological reliability. This paper explored the deposition and effects of TiN protective layer on TiNi thin films to improve their surface properties while retaining the shape memory effects. Results indicated that the presence of an adherent and hard TiN layer (300 nm) on TiNi based SMA film (3.5 μm) formed a passivation layer, improved hardness and tribological properties, without sacrificing the phase transformation and shape memory effect of the TiNi film.

Item Type: Article
Uncontrolled Keywords: TiNi, thin films, TiN, sputtering, shape memory
Subjects: F200 Materials Science
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 26 Mar 2015 11:40
Last Modified: 12 Oct 2019 19:05

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