Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil

Liu, Yong, Luo, Jing Ting, Zhao, Chao, Zhou, Jian, Hassan, Sameer, Li, Yifan, Cooke, Michael, Wu, Qiang, Ng, Wai Pang, Du, Jiang Feng, Liu, Yang and Fu, Yong Qing (2016) Annealing effect on structural, functional and device properties of flexible ZnO acoustic wave sensors based on commercial available Al foil. IEEE Transactions on Electron Devices, 63 (11). pp. 4535-4541. ISSN 0018-9383

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Official URL: http://dx.doi.org/10.1109/TED.2016.2610466

Abstract

This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 m thick were deposited onto aluminum foils (50 μm thick) using magnetron sputtering and then annealed in air at different temperatures between 300 and 500oC. Effects of post-annealing on structural, optical and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350oC was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precision temperature sensing.

Item Type:	Article
Additional Information:	© 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works
Subjects:	F200 Materials Science H600 Electronic and Electrical Engineering
Department:	Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering Faculties > Engineering and Environment > Mechanical and Construction Engineering
Depositing User:	Ay Okpokam
Date Deposited:	10 Oct 2016 09:35
Last Modified:	01 Aug 2021 12:16
URI:	http://nrl.northumbria.ac.uk/id/eprint/27735

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