Surface acoustic wave devices with graphene interdigitated transducers

Zhou, Jian, Shi, Xianglong, Xiao, Dingbang, Wu, Xuezhong, Zheng, Jiangpo, Luo, Jikui, Tao, Xiang, Jin, Hao, Dong, Shurong, Tao, Ran, Duan, Huigao and Fu, Yong Qing (2019) Surface acoustic wave devices with graphene interdigitated transducers. Journal of Micromechanics and Microengineering, 29 (1). 015006. ISSN 0960-1317

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Abstract

This paper reports the development of high performance surface acoustic wave (SAW) devices by using graphene as a virtually massless interdigital transducer (IDT) to mitigate mass-loading effects. Different layers of graphene electrodes were made and their influences on the SAW device performance were experimentally and theoretically evaluated. Results showed that 4-layer graphene with a value of sheet resistance less than 77.6 Ω/sq. and graphene IDTs of at least 80 pairs are needed to obtain the optimum performance of graphene IDT SAW devices. Furthermore, the optimal ratio of aperture/wavelength for the graphene IDT electrode was found to be 5. Graphene based SAW devices, with a resonance frequency of 154 MHz, transmission signal amplitude of 30 dB and K2 of 3.78%, were fabricated and successfully demonstrated for applications in breathing monitoring.

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