Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

Toy, M. Fatih, Ferhanoglu, Onur, Torun, Hamdi and Urey, Hakan (2009) Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing. Sensors and Actuators A: Physical, 156 (1). pp. 88-94. ISSN 0924-4247

Full text not available from this repository.
Official URL: http://dx.doi.org/10.1016/j.sna.2009.02.010


Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.

Item Type: Article
Uncontrolled Keywords: Thermal detector, NETD, Optical readout, Diffraction grating, CCD camera
Subjects: F300 Physics
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 30 Jan 2019 12:04
Last Modified: 11 Oct 2019 14:04
URI: http://nrl.northumbria.ac.uk/id/eprint/37814

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