Flexible ZnO thin film acoustic wave device for gas flow rate measurement

Zhang, Qian, Wang, Yong, Tao, Ran, Torun, Hamdi, Xie, Jin, Li, Yifan, Fu, Chen, Luo, Jingting, Wu, Qiang, Ng, Wai Pang, Binns, Richard and Fu, Richard (2020) Flexible ZnO thin film acoustic wave device for gas flow rate measurement. Journal of Micromechanics and Microengineering, 30 (9). 095010. ISSN 0960-1317

JMM_accepted_paper_FLEXIBLE_ZNO_THIN_FILM_ACOUSTIC_WAVE_DEVICE.pdf - Accepted Version
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Official URL: https://doi.org/10.1088/1361-6439/ab9d2a


In this work, ZnO/Al thin film based flexible acoustic wave devices are demonstrated for their applications in gas flow rate measurements based on the changes in temperature of the devices. A good sensitivity of gas flow rate can be achieved, mainly because thin film based device has a large temperature coefficient of frequency of ~280 ppm/K, owing to the large coefficient of thermal expansion of aluminum foil. A heat source is used to enhance the sensitivity of the thin film device by introducing a temperature offset. The flexible acoustic wave device shows a high sensitivity, fast response times, and a good repeatability for measurement of the flow rate of nitrogen. When the flexible acoustic wave device is bent and attached onto the inner wall of a pipe, the device exhibits good performance for monitoring the gas flow rate, demonstrating its applications of flow rate measurement on curved or randomly shaped surfaces.

Item Type: Article
Uncontrolled Keywords: surface acoustic wave, Flexible device, gas flow rate measurements
Subjects: F200 Materials Science
F300 Physics
G100 Mathematics
H800 Chemical, Process and Energy Engineering
H900 Others in Engineering
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Rachel Branson
Date Deposited: 07 Jul 2020 10:34
Last Modified: 31 Jul 2021 10:32
URI: http://nrl.northumbria.ac.uk/id/eprint/43678

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