Engineering Inclined Orientations of Piezoelectric Films for Integrated Acoustofluidics and Lab-on-a-Chip Operated in Liquid Environments

Fu, Richard, Pang, Hua-Feng, Torun, Hamdi, Tao, Ran, McHale, Glen, Reboud, Julien, Tao, Kai, Zhou, Jian, Luo, Jing-ting, Gibson, Desmond, Luo, Jikui and Hu, PingAn (2021) Engineering Inclined Orientations of Piezoelectric Films for Integrated Acoustofluidics and Lab-on-a-Chip Operated in Liquid Environments. Lab on a Chip, 21 (2). pp. 254-271. ISSN 1473-0197

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Official URL: https://doi.org/10.1039/D0LC00887G

Abstract

Different acoustic wave modes are required for effective implementation of biosensing and liquid actuation functions in an acoustic wave based lab-on-a-chip. For efficient sensing in liquids, shear waves (either a thickness-shear bulk wave or a shear-horizontal surface acoustic wave) can achieve a high sensitivity, without significant loss of acoustic wave energy. On the other hand, longitudinal bulk waves or out-of-plane displacement waves (such as Rayleigh waves) enable efficient sampling functions and liquid manipulation. However, there are significant challenges in developing a lab-on-a-chip to efficiently generate multiple wave modes and perform both these functions on a single piezoelectric substrate, especially when a single crystalline orientation is available. This paper highlights the latest progress of the theories and techniques to deliver both sensing and microfluidic manipulation functions using engineered incline-angled piezoelectric films, allowing for the simultaneous generation of longitudinal (or Rayleigh) and thickness-shear bulk (or shear-horizontal surface acoustic) waves. Challenges and theoretical constraints for generating various wave modes in the inclined films and techniques to efficiently produce inclined columnar and inclined crystalline piezoelectric films using sputtering deposition methods are presented. Applications of different wave modes in the inclined film-based lab-on-chips with multiple sensing and acoustofluidic functions are also discussed.

Item Type: Article
Additional Information: Funding information: Funding support from the UK Engineering and Physical Sciences Research Council (EPSRC) under grant EP/P018998/1, Newton Mobility Grant (IE161019) through Royal Society and the National Natural Science Foundation of China, and Royal Academy of Engineering UK-Research Exchange with China and India, NSFC (51302173, 61274037, 11504291), National Key Research and Development Program of China (Grant no. 2016YFB0402705), Foundation for Distinguished Young Talents in Higher Education of Guangdong (Grant no. 2013LYM_0078), and Basic Research Program of Shenzhen (Grant no. JCYJ20140418091413493) is acknowledged. The following persons are acknowledged for their participation in the research work: Dr. Chao Zhao, Dr. Zhefeng Lei, Dr. Xiang Tao, Dr. Pep Canyelles-Pericas, Dr. Yifan Li, Mr. Andrew Bunyan, Prof. Frank Placido, Dr. Shigeng Song, Prof. William Milne, Prof. Andrew Flewitt, Dr. Mario De Miguel Ramos and Prof. Enrique Iborra.
Subjects: G400 Computer Science
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: John Coen
Date Deposited: 23 Nov 2020 11:16
Last Modified: 02 Sep 2021 14:12
URI: http://nrl.northumbria.ac.uk/id/eprint/44815

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