Flexible/Bendable Acoustofluidics Based on Thin Film Surface Acoustic Waves on Thin Aluminum Sheets

Wang, Yong, Zhang, Qian, Tao, Ran, Xie, Jin, Canyelles-Pericas, Pep, Torun, Hamdi, Reboud, Julien, McHale, Glen, Dodd, Linzi, Yang, Xin, Luo, Jingting, Wu, Qiang and Fu, Richard (2021) Flexible/Bendable Acoustofluidics Based on Thin Film Surface Acoustic Waves on Thin Aluminum Sheets. ACS Applied Materials & Interfaces. ISSN 1944-8244 (In Press)

FlexibleBendable_Acoustofluidics_Based_on_Thin_Film_Surface_Acoustic_Waves_on_Thin_Aluminum_Sheets.pdf - Accepted Version
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Official URL: https://doi.org/10.1021/acsami.0c22576


In this paper, we explore the acoustofluidic performance of zinc oxide (ZnO) thin film surface acoustic wave (SAW) devices fabricated on flexible and bendable thin aluminum (Al) foils/sheets with thicknesses from 50 μm to 1500 μm. Directional transport of fluids along these flexible/bendable surfaces offers potential applications for the next generation of microfluidic systems, wearable biosensors and soft robotic control. Theoretical calculations indicate that bending under strain levels up to 3000 µε causes small frequency shift and amplitude change (< 0.3) without degrading acoustofluidic performance. Through systematic investigation of the effects of Al sheet thickness on microfluidic actuation performance for the bent devices, we identify optimum thickness range to both maintain efficient microfluidic actuation and enable significant deformation of the substrate, providing a guide to design such devices. Finally, we demonstrate efficient liquid transportation across a wide range of substrate geometries including inclined, curved, vertical, inverted and lateral positioned surfaces using 200 μm thick Al sheet SAW device

Item Type: Article
Additional Information: Funding information: This work was supported by the Zhejiang Provincial Natural Science Foundation of China (LZ19E050002), the National Natural Science Foundation of China (51875521, 51605485 and 51575487), the UK Engineering and Physical Sciences Research Council (EPSRC EP/P018998/1 and UK Fluidic Network (EP/N032861/1)-Special Interest Group in Acoustofluidics), and Newton Mobility Grant (IE161019) through Royal Society and NFSC.
Subjects: F100 Chemistry
F200 Materials Science
F300 Physics
H600 Electronic and Electrical Engineering
H800 Chemical, Process and Energy Engineering
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Elena Carlaw
Date Deposited: 26 Mar 2021 15:48
Last Modified: 26 Apr 2021 03:30
URI: http://nrl.northumbria.ac.uk/id/eprint/45805

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