Thin Film Flexible Acoustic Wave Devices with Off-axis Bending Characteristics for Multi-Sensing Applications

Ji, Zhangbin, Zhou, Jian, Lin, Huamao, Wu, Jianhui, Zhang, Dinghong, Garner, Sean, Gu, Alex, Dong, Shurong, Fu, Yongqing (Richard) and Duan, Huiguo (2021) Thin Film Flexible Acoustic Wave Devices with Off-axis Bending Characteristics for Multi-Sensing Applications. Microsystems and Nanoengineering. ISSN 2055-7434 (In Press)

Revised_Manuscript_final.pdf - Accepted Version
Available under License Creative Commons Attribution 4.0.

Download (1MB) | Preview


Flexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread applications in sensing and microfluidics. However, for these applications, the SAW devices often need to be bent into off-axis deformations between the acoustic-wave propagation direction and bending direction. Currently there are few studies on this topic, and the bending mechanisms under off-axis bending deformations have remained unexplored for multi-sensing applications. Herein, we fabricated aluminum nitride (AlN) flexible SAW devices by using high quality AlN films deposited on flexible glass substrates and systematically investigated their complex deformation behaviors. A theoretical model was firstly developed using coupling wave equations and boundary condition method to analyze the device’s characteristics with bending and off-axis deformation under elastic strains. The relationships between frequency shifts of the SAW device with bending strain and off-axis angle were obtained which showed the identical results with those from the theoretical calculations. Finally, we performed proof-of-concept demonstrations of multi-sensing applications by monitoring human wrist movements at various off-axis angles and detecting UV light intensities on a curved surface, thus paving the ways for versatile flexible electronics applications.

Item Type: Article
Additional Information: This work was supported by the General Program of National Natural Science Foundation of China (NSFC No.52075162), Innovation Leading Program of New and High-tech Industry of Hunan Province (2020GK2015), the Natural Science Foundation of Changsha (kq2007026), the Key Research Project of Guangdong Province (2020B0101040002), the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and International Exchange Grant (IEC/NSFC/201078) through Royal Society and the NSFC. We also thank the Shaomin Zhang from Zhejiang University for the IRB approval.
Uncontrolled Keywords: sensors, off-axis angle, frequency-strain, SAW, flexible glass
Subjects: H800 Chemical, Process and Energy Engineering
H900 Others in Engineering
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Rachel Branson
Date Deposited: 08 Oct 2021 14:37
Last Modified: 08 Oct 2021 14:45

Actions (login required)

View Item View Item


Downloads per month over past year

View more statistics