Electrochemical Strategy for High-Resolution Nanostructures in Laser-Heat-Mode Resist Toward Next Generation Diffractive Optical Elements

Wang, Zhengwei, Chen, Guodong, Wen, Ming, Hu, Xutao, Liu, Xing, Wei, Jingsong, Wu, Qingsheng and Fu, Yong Qing (2022) Electrochemical Strategy for High-Resolution Nanostructures in Laser-Heat-Mode Resist Toward Next Generation Diffractive Optical Elements. Small, 18 (17). p. 2200249. ISSN 1613-6810

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Official URL: https://doi.org/10.1002/smll.202200249

Abstract

For achieving high-resolution nanostructures for next-generation diffractive optical elements (DOEs) using an environmentally friendly process, an electrochemical development strategy is proposed and developed using AgInSbTe-based laser heat-mode resist (AIST-LHR). Based on the electrical resistivity difference of amorphous and crystalline phases for this resist, an etching selectivity ratio of ≈30:1 (i.e., the etch ratio between the amorphous and crystalline ones) is achieved through the oxidation of Fe3+ ions with the assisted pitting activation etching using Cl− ions in an acid medium. Nanostructures with a minimum feature size down to 41 nm are successfully generated, including grating patterns, meta-surface optical structures, gears, and English characters. Using a post-plasma etching process, the nanostructures are successfully transferred from the AIST-HLR onto silica substrate, and X-ray grating patterns with a line space of 80 nm are created as a demonstration for its potential applications in DOEs.

Item Type: Article
Additional Information: Funding information: This work was partially supported by the National Natural Science Foundation of China (Nos. 61627826 and 22171212), Strategic High-Tech Innovation Fund of the Chinese Academy of Sciences (GQRC-19-08), International Corporation Project of Shanghai Committee of Science and Technology by China (21160710300), International Exchange Grant (IEC/NSFC/201078) of Royal Society UK and NSFC. Author 1 (Zhengwei Wang) and Author 2 (Guodong Chen) contributed equally to this work.
Uncontrolled Keywords: Electrochemical development, high-resolution lithography, AgInSbTe laser heat mode resist, diffractive optical elements
Subjects: F200 Materials Science
F300 Physics
H800 Chemical, Process and Energy Engineering
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: John Coen
Date Deposited: 09 Feb 2022 11:53
Last Modified: 24 May 2022 14:45
URI: http://nrl.northumbria.ac.uk/id/eprint/48417

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