Flexible Multifunctional Platform Based on Piezoelectric Acoustics for Human-Machine Interaction and Environmental Perception

Zhang, Qian, Wang, Yong, Li, Dongsheng, Xie, Jin, Tao, Ran, Luo, Jingting, Dai, Xuewu, Torun, Hamdi, Wu, Qiang, Ng, Wai Pang, Binns, Richard and Fu, Yong Qing (2022) Flexible Multifunctional Platform Based on Piezoelectric Acoustics for Human-Machine Interaction and Environmental Perception. Microsystems and Nanoengineering. ISSN 2055-7434 (In Press)

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Abstract

Flexible human-machine interface shows broad prospects for the next-generation flexible or wearable electronics, in comparisons with currently available bulky and rigid counterparts. However, most of these reported flexible devices (e.g., flexible loudspeakers and microphones) show inferior performance compared to their rigid counterparts, mainly due to the nature of their flexibility. Therefore, it is of great significance to improve their performance by developing and optimizing new materials, structures and design methodology. In this paper, a flexible acoustic platform based on zinc oxide (ZnO) thin film on aluminum foil substrate is developed and optimized, which can be applied as a loudspeaker, a microphone, or an ambient sensor depending on the selection of its excitation frequencies. When used as a speaker, the proposed structure shows a high sound pressure level (SPL) of ~90 dB (with a standard deviation of ~3.6 dB), a low total harmonic distortion of ~1.41, and a uniform directivity (with a standard deviation of ~4 dB). Its normalized SPL is higher than those of similar devices reported in recent literature. When used as a microphone, the proposed device shows a precision of 98 for speech recognition, and the measured audio signals show a strong similarity to the original audio ones, demonstrating its equivalent performance compared to a rigid commercial microphone. When used as a flexible sensor, this device shows a high temperature coefficient of frequency of -289 ppm/K and a good performance for respiratory monitoring.

Item Type: Article
Additional Information: Funding information: We would like to thank all the volunteers who are involved in this work. This work is supported by the “National Natural Science Foundation of China (NSFC 51875521, 52175552, 12104320)”, the “Zhejiang Provincial Natural Science Foundation of China (LZ19E050002)”, the “Science Fund for Creative Research Groups of National Natural Science Foundation of China (51821093)”, the Key Research and Development Program of Guangdong Province (Grant No.: 2020B0101040002), Special Projects in Key Fields of Colleges in Guangdong Province (2020ZDZX2007), Research Project in Fundamental and Application Fields of Guangdong Province (2020A1515110561), Guangdong Basic and Applied Basic Research Foundation (2019A1515111199), and Shenzhen Science & Technology Project (Grant No. JCYJ20180507182106754, JCYJ20180507182439574, RCBS20200714114918249, GJHZ20200731095803010), the Engineering Physics and Science Research Council of UK (EPSRC 10 EP/P018998/1), and International Exchange Grant (IEC/NSFC/201078) through Royal Society UK and the NSFC, and EPSRC NetworkPlus in Digitalised Surface Manufacturing (EP/S036180/1).
Uncontrolled Keywords: Flexible acoustic platform, piezoelectric film, acoustic wave, human-machine interaction, environmental perception
Subjects: H800 Chemical, Process and Energy Engineering
Depositing User: Rachel Branson
Date Deposited: 14 Jun 2022 14:06
Last Modified: 14 Jun 2022 14:06
URI: http://nrl.northumbria.ac.uk/id/eprint/49310

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