 | Up a level |
Sanchez, Martha, Panning, Eric, Alaca, B. Erdem, Lenk, Claudia, Ates, Onur, Volland, Burkhard, Torun, Hamdi, Yalcinkaya, Arda, Bicer, Mahmut, Rangelow, Ivo, Aydogan, Cemal and Hofmann, Martin (2018) Fabrication of optical nanodevices through field-emission scanning probe lithography and cryogenic etching. In: Novel Patterning Technologies 2018. SPIE, 105841G.