Test structure for characterizing low voltage coplanar EWOD system

Li, Yifan, Mita, Yoshio, Haworth, Les, Parkes, William, Kubota, Masanori and Walton, Anthony (2009) Test structure for characterizing low voltage coplanar EWOD system. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 88-95. ISSN 0894-6507

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Abstract

This paper presents test structures designed for studying the relationship between the operating voltage and different electrode configurations and areas for coplanar electrowetting on dielectrics (EWOD) devices. New test structures have been designed and fabricated using anodic Ta2O5 dielectric and thin aFP (amorphous Fluoropolymer CYTOP from Asahi Glass Co., Ltd.). These test structures have been used to characterize the contact angle change, which is between 114deg and 81deg with an applied voltage of less than 20 V. This demonstrates that by modifying the coplanar architecture, the operating voltage can be reduced by a factor of two, compared to previously reported coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15 V.

Item Type:	Article
Uncontrolled Keywords:	Coplanar EWOD, Ta205, electrowetting-on-dielectric (EWOD), lab-on-a-chip (LOC), low voltage, microfluidics, test structure
Subjects:	F300 Physics H600 Electronic and Electrical Engineering
Department:	Faculties > Engineering and Environment > Mechanical and Construction Engineering
Depositing User:	Yifan Li
Date Deposited:	26 Feb 2015 14:12
Last Modified:	13 Oct 2019 00:20
URI:	http://nrl.northumbria.ac.uk/id/eprint/21225

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