BCB film based SAW humidity sensor

Liu, Y., Wang, Changhai and Li, Yifan (2011) BCB film based SAW humidity sensor. Electronics letters, 47 (18). pp. 1012-1014. ISSN 0013-5194

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Official URL: http://dx.doi.org/10.1049/el.2011.2078


Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH was successfully demonstrated between 8.6 and 90.6 relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.

Item Type: Article
Subjects: F200 Materials Science
F300 Physics
H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Mechanical and Construction Engineering
Depositing User: Yifan Li
Date Deposited: 26 Feb 2015 12:01
Last Modified: 12 Oct 2019 22:53
URI: http://nrl.northumbria.ac.uk/id/eprint/21241

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