Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods

Guo, Yuanjun, Zhang, Jia, Zhao, Chao, Ma, Jin-Yi, Pang, Hua-Feng, Hu, Ping An, Placido, Frank, Gibson, Desmond, Zu, Xiao-Tao, Zu, H. Y. and Fu, Yong Qing (2013) Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods. Materials Research Bulletin, 48 (12). pp. 5058-5063. ISSN 0025 5408

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Abstract

Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.

Item Type:	Article
Uncontrolled Keywords:	Thin films, nanostructures, X-ray diffraction, electron microscopy, surface properties
Subjects:	F200 Materials Science
Department:	Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User:	Becky Skoyles
Date Deposited:	23 Mar 2015 11:57
Last Modified:	12 Oct 2019 19:08
URI:	http://nrl.northumbria.ac.uk/id/eprint/21705

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