Preparation of crystalline TiNi shape-memory alloy thin film for MEMS applications

Fu, Yong Qing, Du, Hejun, Huang, Wei Min, Huang, Xu, Miao, Jianmin and Liu, Yong (2000) Preparation of crystalline TiNi shape-memory alloy thin film for MEMS applications. Proceedings of SPIE, 4230. pp. 140-146. ISSN 0277-786X

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Thin film shape-memory alloys have been recognized as a promising and high performance material in the field of microelectromechanical systems applications. In this investigation, TiNi films were prepared by sputtering Ti and Ni target in argon gas using a magnetron sputtering system. Chemical composition, crystallography, microstructure and phase transformation behaviors of the deposited TiNi film were studied. Differential scanning calorimeter results showed that a two-stage transformation occurs in a sequence of monoclinic martensitic phase to rhombohedral phase, then to B2 phase upon heating, and vice versa on cooling. X-ray diffraction analysis also revealed the crystalline structure changes with the change of the temperatures. Nano- indentation reveals the elastic modulus of the film is about 5.11 GPa and the film intrinsic hardness is 2.84 +/- 0.5 GPa. By depositing TiNi films on the bulk micromachined Si cantilever structures, we obtained micro-grippers exhibiting a good shape-memory effect.

Item Type: Article
Subjects: F200 Materials Science
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 24 Mar 2015 15:44
Last Modified: 12 Oct 2019 19:05

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