Fabrication of micromachined TiNi-based microgripper with compliant structure

Fu, Yong Qing and Du, Hejun (2003) Fabrication of micromachined TiNi-based microgripper with compliant structure. Proceedings of SPIE, 5116. pp. 38-47. ISSN 0277-786X

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Official URL: http://dx.doi.org/10.1117/12.498184


One of the problems faced in the development of micro-gripper is that the actuation displacement or force is too small. In this study, it is aimed to solve this problem with application of shape memory and compliant mechanisms. TiNi film based micro-gripper with compliant structure was design, simulated and fabricated. Some important issues regarding to the preparation of high performance shape memory TiNi films using sputtering methods were discussed.

Item Type: Article
Subjects: F200 Materials Science
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 26 Mar 2015 12:05
Last Modified: 12 Oct 2019 19:05
URI: http://nrl.northumbria.ac.uk/id/eprint/21806

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