Magnetron sputtering of nanocomposite (Ti,Cr)CN/DLC coatings

Zhang, Sam, Fu, Yong Qing, Du, Hejun, Zeng, X. T. and Liu, Y. C. (2003) Magnetron sputtering of nanocomposite (Ti,Cr)CN/DLC coatings. Surface and Coatings Technology, 162 (1). pp. 42-48. ISSN 0257-8972

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Abstract

Superhard nanocrystalline (Ti, Cr)CN/DLC coatings were prepared through co-sputtering of Ti, Cr and graphite targets in an argon/nitrogen atmosphere. Results from both transmission electron microscopy (TEM) and grazing incident X-ray diffraction (GIXRD) indicated that the grain size of (TiCr)CxNy crystals was approximately 10–20 nm. X-ray photoelectron spectroscopic studies confirmed that an increase in the sputtering power at the Ti target not only increased the Ti composition in the film but also brought about an increase in sp3 bonding in DLC matrix, in agreement with the raising hardness with Ti sputtering power. Film hardness and elastic modulus were measured with a nano-indenter, and film hardness reached 40 GPa. Tribological behaviors of the films were evaluated using a ball-on-disk tribometer, and the films demonstrated properties of low-friction and good wear resistance.

Item Type:	Article
Uncontrolled Keywords:	Nanocomposite coating; Diamond-like carbon; (Ti,Cr)N; Sputtering; Tribology; Wear; Coefficient of friction
Subjects:	F200 Materials Science
Department:	Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User:	Becky Skoyles
Date Deposited:	26 Mar 2015 12:37
Last Modified:	12 Oct 2019 19:05
URI:	http://nrl.northumbria.ac.uk/id/eprint/21812

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