A silicon-on-insulator based micro check valve

Hu, Min, Du, Hejun, Ling, Shih-Fu, Fu, Yong Qing, Chen, Quanfang, Chow, Louis and Li, Bo (2003) A silicon-on-insulator based micro check valve. Journal of Micromechanics and Microengineering, 14 (3). pp. 382-387. ISSN 0960-1317

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Official URL: http://dx.doi.org/10.1088/0960-1317/14/3/010


In this paper we present a bulk micromachined check valve with very high frequency and extremely low leak rates. The valve is designed to have a hexagonal orifice, a hexagonal membrane flap and three flexible tethers. The three elbow-shaped flexible tethers are used to secure the membrane flap to the valve seat and to obtain large flap displacement in the forward flow direction. A silicon-on-insulator wafer and deep reactive ion etching technology are used to implement this microvalve. A very simple fabrication process has been developed, and only two photolithographic masks are required. Preliminary fluidics testing on a 1.44 mm size check valve was performed. A maximum flow rate (deionized water) of 35.6 ml min−1 was obtained at a forward pressure of 65.5 kPa, and only negligible leakage rate was observed at a reverse pressure of up to 600 kPa. The frequency response of the valve in air was also measured and its first resonance frequency was found at 17.7 kHz.

Item Type: Article
Subjects: F200 Materials Science
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 26 Mar 2015 13:07
Last Modified: 12 Oct 2019 19:05
URI: http://nrl.northumbria.ac.uk/id/eprint/21821

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