Large Surface Strain Sensing Structures based on Elastic Instabilities

Li, Yifan, McHale, Glen, Smith, S., Walton, Anthony and Xu, Ben (2015) Large Surface Strain Sensing Structures based on Elastic Instabilities. In: International Conference on Microelectronic Test Structures (ICMTS), March 23 - 26, 2015, Tempe, Arizona, US.

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Sensing large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure is reported. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.

Item Type: Conference or Workshop Item (Speech)
Subjects: H300 Mechanical Engineering
J500 Materials Technology not otherwise specified
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Faculties > Engineering and Environment > Mechanical and Construction Engineering
Related URLs:
Depositing User: Bin Xu
Date Deposited: 27 Mar 2015 09:00
Last Modified: 12 Oct 2019 19:20

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