Laser micromachining of sputtered DLC films

Fu, Yong Qing, Luo, J. K., Flewitt, Andrew, Ong, Soon-Eng, Zhang, Sam and Milne, William (2006) Laser micromachining of sputtered DLC films. Applied Surface Science, 252 (13). pp. 4914-4918. ISSN 0169 4332

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DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp2/sp3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details.

Item Type: Article
Uncontrolled Keywords: DLC; Microcantilever; Laser micromachining
Subjects: F200 Materials Science
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 27 Mar 2015 09:39
Last Modified: 12 Oct 2019 19:06

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