ZnO film thickness effect on surface acoustic wave modes and acoustic streaming

Du, X.Y., Fu, Yong Qing, Tan, S. C., Luo, Jikui, Flewitt, Andrew, Milne, William, Lee, Dae-Sik, Park, Nae-Man, Park, J., Choi, Youngjin, Kim, Sang Hyeob and Maeng, Sunglyul (2008) ZnO film thickness effect on surface acoustic wave modes and acoustic streaming. Applied Physics Letters, 93 (9). 094105. ISSN 0003 6951

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Abstract

Surface acoustic wave(SAW) devices were fabricated on ZnO thin films deposited on Si substrates. Effects of ZnOfilm thickness on the wave mode and resonant frequency of the SAWs have been investigated. Rayleigh and Sezawa waves were detected, and their resonant frequencies decrease with increase in film thickness. The Sezawa wave has much higher acoustic velocity and larger signal amplitude than those of Rayleigh mode wave.Acoustic streaming for mixing has been realized in piezoelectric thin filmSAWs. The Sezawa wave has a much better efficiency in streaming, and thus is very promising for application in microfluidics.

Item Type:	Article
Subjects:	F200 Materials Science
Department:	Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User:	Becky Skoyles
Date Deposited:	27 Mar 2015 10:54
Last Modified:	12 Oct 2019 19:06
URI:	http://nrl.northumbria.ac.uk/id/eprint/21890

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