Elastic instabilities induced large surface strain sensing structures (EILS)

Li, Yifan, Terry, Jonathan, Smith, S., Walton, Anthony, McHale, Glen and Xu, Ben (2015) Elastic instabilities induced large surface strain sensing structures (EILS). In: Proceedings of the 2015 International Conference on Microelectronic Test Structures. IEEE, Piscataway, NJ, pp. 94-99. ISBN 978-4799-8304-9

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Abstract

This paper reports on the sensing of large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.

Item Type:	Book Section
Subjects:	H600 Electronic and Electrical Engineering
Department:	Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering Faculties > Engineering and Environment > Mechanical and Construction Engineering
Depositing User:	Becky Skoyles
Date Deposited:	15 Sep 2015 14:19
Last Modified:	12 Oct 2019 19:20
URI:	http://nrl.northumbria.ac.uk/id/eprint/23766

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