In-situ Stress Monitoring with a Laser-Fibre System

Barrioz, Vincent, Irvine, Stuart and Jones, D. P. (2002) In-situ Stress Monitoring with a Laser-Fibre System. Advanced Engineering Materials, 4 (8). pp. 550-554. ISSN 1438 1656

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Abstract

A novel laser-fibre system is used for in-situ stress monitoring of thin film deposition on a glass substrate. The authors have shown that it could also be used to monitor the temperature of the substrate, as well as the thickness of the growing layer, using the thin film interference equation. Single layers of ZnS and YF3 optical coatings have been evaporated onto borosilicate glass, doped with cerium oxide, in the environment of a high vacuum (HV) chamber. The results obtained show that the novel laser-fibre system used as a stress monitor can give insights into the causes of thin film residual stress in vacuum evaporation.

Item Type:	Article
Uncontrolled Keywords:	In-situ stress measurement; Laser-fibre system; Yttrium fluoride; Zinc sulfide
Subjects:	F200 Materials Science
Department:	Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User:	Becky Skoyles
Date Deposited:	24 Nov 2015 11:08
Last Modified:	12 Oct 2019 19:05
URI:	http://nrl.northumbria.ac.uk/id/eprint/24722

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