The role of fabrication techniques on the performance of widely tunable micromachined capacitors

Gallant, Andrew and Wood, David (2004) The role of fabrication techniques on the performance of widely tunable micromachined capacitors. Sensors and Actuators A: Physical, 110 (1-3). pp. 423-431. ISSN 0924-4247

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Abstract

Coventorware 2001.1® is used to identify key vertical dimensions for the low voltage operation of a two-gap widely tunable capacitor. Using identical masking stages, two varieties of tunable capacitor are presented. Nickel structures are demonstrated which have a tuning ratio of 5.1:1 from an initial capacitance of 0.7 pF. Gold devices exhibit a tuning ratio of 7.3:1 from an initial capacitance of 1.5 pF. These are the most widely tunable devices reported to date.

Item Type:	Article
Uncontrolled Keywords:	RF-MEMS, Varactor, Pull-in, Electroplating
Subjects:	P900 Others in Mass Communications and Documentation
Department:	Faculties > Engineering and Environment > Geography and Environmental Sciences
Depositing User:	Becky Skoyles
Date Deposited:	29 Mar 2018 11:54
Last Modified:	11 Oct 2019 21:18
URI:	http://nrl.northumbria.ac.uk/id/eprint/33887

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