ZnO thin film based flexible temperature sensor

Hasan, Sameer, Gibson, Des, Song, Shigeng, Wu, Qiang, Ng, Wai Pang, McHale, Glen, Dean, John and Fu, Yong Qing (2017) ZnO thin film based flexible temperature sensor. In: 2017 IEEE SENSORS. IEEE. ISBN 978-1-5090-1013-4

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Official URL: https://doi.org/10.1109/ICSENS.2017.8234387


ZnO thin film based flexible SAW devices were fabricated on commercial aluminum foils. The frequency responses were characterized and zero order Lamb wave modes were used to perform flexible temperature sensing. The devices exhibited a large value of temperature coefficient of frequency, good temperature sensitivity, and repeatability. They are promising to be used for flexible and wearable temperature sensing applications.

Item Type: Book Section
Uncontrolled Keywords: ZnO, thin film, Flexible SAW device, TCF
Subjects: F300 Physics
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Becky Skoyles
Date Deposited: 04 May 2018 08:46
Last Modified: 11 Oct 2019 20:47
URI: http://nrl.northumbria.ac.uk/id/eprint/34152

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