Nonlinear thermo-mechanical behaviour of MEMS resonators

Farokhi, Hamed and Ghayesh, Mergen H. (2017) Nonlinear thermo-mechanical behaviour of MEMS resonators. Microsystem Technologies, 23 (12). pp. 5303-5315. ISSN 0946-7076

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This paper investigates the static deflection as well as the nonlinear resonant behaviour of an electrically actuated MEMS resonator subject to a temperature rise. The deformable electrode is actuated by a harmonic AC load superimposed to a constant DC load. Taking into account thermal effects, the size-dependent equation of motion is derived by means of the extended Hamilton’s principle together with the modified couple stress theory. The effect of temperature rise on the mechanical properties of the microresonator is also taken into account. Based on the Galerkin method, a high-dimensional discretised model of the microresonator is obtained which is solved by means of the pseudo-arclength continuation technique. In particular, the non-trivial deflected configuration of the deformable electrode, as well as the static pull-in voltage, is obtained. The nonlinear resonant behaviour of the system is analyzed when the system is actuated by the AC voltage near the primary resonance. The effect of temperature rise on the static and dynamic responses of the system is highlighted. Furthermore, it is shown that when the mechanical properties are considered temperature-dependent, rather than constant, the behaviour of the system changes significantly.

Item Type: Article
Uncontrolled Keywords: Static Deflection, Modify Couple Stress Theory, Deformable Electrode, Deflected Configuration, Small Excitation Frequency
Subjects: H300 Mechanical Engineering
H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Mechanical and Construction Engineering
Depositing User: Paul Burns
Date Deposited: 13 Aug 2018 16:41
Last Modified: 11 Oct 2019 19:45

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