MEMS bimaterial IR sensor array with AC-coupled optical readout

Adiyan, Ulas, Civitci, Fehmi, Ferhanoglu, Onur, Torun, Hamdi and Urey, Hakan (2015) MEMS bimaterial IR sensor array with AC-coupled optical readout. In: 2015 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE. ISBN 978-1-4673-6834-6

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Abstract

This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

Item Type:	Book Section
Subjects:	F300 Physics
Department:	Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User:	Becky Skoyles
Date Deposited:	10 Jun 2019 10:46
Last Modified:	10 Oct 2019 18:17
URI:	http://nrl.northumbria.ac.uk/id/eprint/39590

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