MOEMS thermal imaging camera

Toy, M. Fatih, Ferhanoglu, Onur, Torun, Hamdi, Degertekin, F. Levent and Urey, Hakan (2008) MOEMS thermal imaging camera. In: PRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008, 22nd - 25th June 2008, Istanbul, Turkey.

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Abstract

A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	Detectors, Charge coupled devices, Temperature measurement, Cameras, Noise, Arrays, Optical device fabrication
Subjects:	H600 Electronic and Electrical Engineering
Department:	Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User:	Paul Burns
Date Deposited:	14 Jun 2019 15:01
Last Modified:	10 Oct 2019 18:02
URI:	http://nrl.northumbria.ac.uk/id/eprint/39707

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