MOEMS thermal imaging camera

Toy, M. Fatih, Ferhanoglu, Onur, Torun, Hamdi, Degertekin, F. Levent and Urey, Hakan (2008) MOEMS thermal imaging camera. In: PRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008, 22nd - 25th June 2008, Istanbul, Turkey.

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A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Detectors, Charge coupled devices, Temperature measurement, Cameras, Noise, Arrays, Optical device fabrication
Subjects: H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Paul Burns
Date Deposited: 14 Jun 2019 15:01
Last Modified: 10 Oct 2019 18:02

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