Thermal deflections in multilayer microstructures and athermalization

Torun, Hamdi and Urey, Hakan (2006) Thermal deflections in multilayer microstructures and athermalization. Journal of Applied Physics, 100 (2). 023527. ISSN 0021-8979

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Exact and approximate analytical solutions are developed for calculating the thermally induced deformation of three-layer cantilever structures. The solution is derived from the closed-form solutions for multilayer films. Thermal deformation and athermalization conditions are derived using dimensionless parameters for film to substrate thickness ratios for three-layer structures. The analytical solution for a narrow beam is applied to a scan mirror plate suspended with two torsional flexures. The results agreed well with finite element method simulations and experiments. Tests are performed using a bulk-micromachined silicon microelectromechanical system scanner that has a thin gold (Au) coil layer on one side and an aluminum (Al) mirror layer on the other side. Useful figures using film-to-substrate thickness ratios and the material independent normalized parameters are introduced for easy thermal deformation computations and performance trades for three-layer structures.

Item Type: Article
Subjects: J500 Materials Technology not otherwise specified
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Paul Burns
Date Deposited: 14 Jun 2019 15:06
Last Modified: 10 Oct 2019 18:02

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