Torun, Hamdi, Ferhanoglu, Onur and Urey, Hakan (2006) Thermo-Mechanical Detector Array with Optical Readout. In: IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, 21st - 24th August 2006, Big Sky, Minnesota.
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Official URL: http://dx.doi.org/10.1109/OMEMS.2006.1708290
Abstract
An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Uncontrolled Keywords: | Optical arrays, Thermomechanical processes, Optical detectors, Sensor arrays, Optical interferometry, Optical noise, Optical diffraction, Diffraction gratings, Silicon compounds, Optical sensors |
| Subjects: | H600 Electronic and Electrical Engineering |
| Department: | Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering |
| Depositing User: | Paul Burns |
| Date Deposited: | 14 Jun 2019 15:14 |
| Last Modified: | 10 Oct 2019 18:02 |
| URI: | http://nrl.northumbria.ac.uk/id/eprint/39709 |
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