Thermo-Mechanical Detector Array with Optical Readout

Torun, Hamdi, Ferhanoglu, Onur and Urey, Hakan (2006) Thermo-Mechanical Detector Array with Optical Readout. In: IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, 21st - 24th August 2006, Big Sky, Minnesota.

Full text not available from this repository.
Official URL:


An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Optical arrays, Thermomechanical processes, Optical detectors, Sensor arrays, Optical interferometry, Optical noise, Optical diffraction, Diffraction gratings, Silicon compounds, Optical sensors
Subjects: H600 Electronic and Electrical Engineering
Department: Faculties > Engineering and Environment > Mathematics, Physics and Electrical Engineering
Depositing User: Paul Burns
Date Deposited: 14 Jun 2019 15:14
Last Modified: 10 Oct 2019 18:02

Actions (login required)

View Item View Item


Downloads per month over past year

View more statistics