Surface acoustic wave ammonia sensor based on ZnS mucosal-like nanostructures

Long, Gongdi, Guo, Yuanjun, Li, Wei, Tang, Qingbo, Zu, Xiaotao, Ma, Jinyi, Du, Bo and Fu, Richard (2020) Surface acoustic wave ammonia sensor based on ZnS mucosal-like nanostructures. Microelectronic Engineering, 222. p. 111201. ISSN 0167-9317

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Abstract

Mucosal-like ZnS nanostructures were synthesized on surface of ST-cut quartz surface acoustic wave (SAW) device using a chemical bath deposition method for ammonia sensing applications. Results showed the SAW device with ZnS mucosal nanostructures achieved a good sensitivity, e.g., with a frequency shift of ~190 Hz upon exposure to 1 ppm ammonia gas. This is mainly attributed to the large specific surface areas and more active sites on the surfaces of the ZnS mucosal nanostructures. Selectivity of the SAW device with the ZnS mucosal nanostructure for ammonia sensing was excellent in comparisons with those for other types of gases such as hydrogen sulfide, hydrogen, nitrogen dioxide, carbon monoxide and ethanol.

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