Flexible ZnO thin film acoustic wave device for gas flow rate measurement

Zhang, Qian, Wang, Yong, Tao, Ran, Torun, Hamdi, Xie, Jin, Li, Yifan, Fu, Chen, Luo, Jingting, Wu, Qiang, Ng, Wai Pang, Binns, Richard and Fu, Richard (2020) Flexible ZnO thin film acoustic wave device for gas flow rate measurement. Journal of Micromechanics and Microengineering, 30 (9). 095010. ISSN 0960-1317

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Abstract

In this work, ZnO/Al thin film based flexible acoustic wave devices are demonstrated for their applications in gas flow rate measurements based on the changes in temperature of the devices. A good sensitivity of gas flow rate can be achieved, mainly because thin film based device has a large temperature coefficient of frequency of ~280 ppm/K, owing to the large coefficient of thermal expansion of aluminum foil. A heat source is used to enhance the sensitivity of the thin film device by introducing a temperature offset. The flexible acoustic wave device shows a high sensitivity, fast response times, and a good repeatability for measurement of the flow rate of nitrogen. When the flexible acoustic wave device is bent and attached onto the inner wall of a pipe, the device exhibits good performance for monitoring the gas flow rate, demonstrating its applications of flow rate measurement on curved or randomly shaped surfaces.

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